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Alumina Ceramic Arm for Robotic Wafer Handling
Aliases:Ceramic Fork for Robotic Arm Silicon Wafer Handling
Introduction
The alumina ceramic arm, also called a wafer handling manipulator or silicon wafer handling fork, is essential in semiconductor equipment. Designed for the stringent demands of semiconductor manufacturing, it offers high-temperature resistance, wear resistance, chemical stability, and excellent electrical insulation, making it vital in the global semiconductor industry.
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Alumina Ceramic Arm for Robotic Wafer Handling
*Some content and parameters are for reference only. Our company can adjust ceramic performance and customize processing according to customer needs.
Design Features
Excellent Heat Resistance
Alumina ceramics can operate stably at temperatures up to 1650°C, which is crucial for the high-temperature environments common in semiconductor manufacturing.
High Wear Resistance and Chemical Stability
This material offers exceptional resistance to mechanical wear and chemical corrosion, ensuring long-term durability and stability.
Non-Conductivity
The non-conductive nature of alumina ensures that no static interference occurs when handling sensitive electronic components, which is essential for preventing damage to delicate circuits.
Optimized Geometric Design
Featuring multiple mounting holes and two elongated handles, the design allows for easy attachment to other mechanical equipment while maintaining high precision in operations.
Surface Treatment
A smooth surface finish reduces friction, enhancing accuracy and reliability during handling processes.
Application Areas
Alumina ceramic arms have widespread applications in semiconductor manufacturing, primarily including the following areas:
Silicon Wafer Handling
Accurately transporting and positioning silicon wafers under extreme conditions, ensuring efficiency and precision in the manufacturing process.
Handling Sensitive Electronic Components
Operating without generating static electricity, protecting the integrity and functionality of electronic components.
Operation in High-Temperature and Corrosive Environments
Stability in chemical gas and high-temperature environments makes it extremely useful in specialized processes such as etching and cleaning.
Dongguan Haikun New Material Co., Ltd.
A global advanced precision ceramics (special ceramics) manufacturer, focusing on the development, design, production and sales of advanced precision ceramic products, covering zirconium oxide, aluminum oxide, silicon nitride and other materials, which are widely used in aviation, aerospace, military industry, medical and other fields
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Comparison of ceramic material properties
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*The values in the table are typical material properties
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